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TNFC | Toronto Nanofabrication Centre

TNFC | Toronto Nanofabrication Centre

  • About TNFC
    • Contact Us
    • Facilities
    • History
    • Partners
    • Scholarship
  • Capabilities
    • Electron Beam Lithography
    • Photolithography
    • Deposition
    • Etching
    • Dicing & Packaging
    • Imaging & Characterization
  • User Access
    • Access Forms
    • Access Fees
    • Access System
    • User Training
    • User Recipes
  • Client Services

Electron Beam Lithography Recipes

PMMA Resist

Copolymer Resist

PMMA/Copolymer Double Layer Resist

ZEP-520A Resist

AR-P 6200 Resist

ma-N Resist

XR-1541 Resist

 

TNFC News & Events

  • University of Toronto Core Facilities Showcase – Oct. 10 2024 25/09/2024
  • Event Info from TNFC User – Professor Kherani on May 29th and May 30th at Hart House 27/05/2024
  • Unveiling the Future of Nanotech: TNFC Reopening Celebration 22/10/2023
  • TNFC’s Pratt Cleanroom Renovation 30/08/2023
  • CoventorWare and MEMS+ Training 04/05/2021

External Links

  • University of Toronto Homepage
  • Applied Science & Engineering
  • About TNFC
    • Contact Us
    • Facilities
    • History
    • Partners
    • Scholarship
  • Capabilities
    • Electron Beam Lithography
    • Photolithography
    • Deposition
    • Etching
    • Dicing & Packaging
    • Imaging & Characterization
  • User Access
    • Access Forms
    • Access Fees
    • Access System
    • User Training
    • User Recipes
  • Client Services
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