TNFC 2015 Annual Newsletter

LPCVD Installation in Pratt Microfabrication Facility

The Expertech CTR-200 LPCVD Nitride Furnace is now online and available for user training and reservation. This furnace extends the processing range to 200mm diameter substrates.

The small footprint CTR system is stackable. The space above this unit is reserved for adding an identical LPCVD system for polysilicon deposition in the future.

Capabilities of the LPCVD tool include:
• High quality silicon nitride deposition
• 100mm – 200mm diameter wafers or 125mm – 156mm square substrates
• Batch loading up to 25 wafers/substrates
• Furnace Temperature Profiling up to ~900C with Triple-zone Control
• User specific programmable ramping recipes (up to 50 process steps)
• Intuitive Windows GUI with network access

CMP Installation in Pratt Microfabrication Facility

The Axus POLI 500 Chemical Mechanical Polisher (CMP) is now online and available for user training and reservation.

This tool can be used to achieve highly smooth, planarized surfaces on substrate materials for precise, topographically dependent processing, including MEMS applications.

Capabilities of the CMP tool include:
• Wafer Accommodation: Up to 6″
• Speed Range: 30-200 rpm
• Head Oscillation: ±12mm
• Pressing Method: Variable Air Pressure Electronic Controller, 1 psi ~ 10 psi for 4″ Wafer
• Intuitive touch screen interface
• Stable Repeatability (WTWNU < 5%)

New Thermal Evaporator Purchased

TNFC has received funding from Prof. Ted Sargent’s CFI award for ” Nanomaterials for Energy “. We have ordered a new Thermal Evaporator Multi-Source Deposition System to replace the aging (over 12 years old) and failure-prone thermal evaporator in the Pratt Cleanroom and electron-beam evaporator in the Bahen Cleanroom. This new system will feature :

• Four pocket electron-beam source with two axis beam sweep control
• Two positions for thermal filament or boat sources
• Rotating and heated (up to 400 C) substrate holder
• Capable of sequential and co-deposition of films
• Modern computer control with automated sequencing and process data logging

This highly anticipated new Thermal Evaporator will start-up in the Fall of 2015.

TNFC Joins CMC FACT Services

In 2014, TNFC became an inaugural member in a CMC project to implement a nationwide process development database and workflow design tool. The new FACT Services program allows external CMC clients to select and combine process capabilities from a number of open-access microfabrication facilities throughout Canada, including TNFC.

2015 Nortel Undergraduate Scholarship

Established in 1997 with contributions from Nortel, the Government of Ontario, and the University of Toronto, the Nortel Institute Undergraduate Scholarship has an approximate value of $5000, and is awarded to an outstanding undergraduate student at the University of Toronto.

The recipient of the 2014-15 scholarship is Trillium Chang, a student of Trinity College, Pathobiology & Genetics.

New Director for TNFC Starting July 1st

TNFC is pleased to welcome Professor Harry Ruda (MSE) as the next Director of the Centre, taking over for Professor Wai Tung Ng (2014- 2015 Director) as of July 1st, 2015.
Harry E. Ruda received the B.Sc. degree (with distinction) from Imperial College of Science and Technology, UK in 1983, and Ph.D. degree from Massachusetts Institute of Technology, Cambridge, USA in 1982. In 1989, he joined the MSE department at the University of Toronto, cross appointed to ECE. In 1997 he was appointed as the Director of University of Toronto’s Centre for Nanotechnology.

Professor Ruda has published over 250 publications in internationally refereed journals (with >2,800 SCI citations), co-authored 4 books and has 14 patents. His research interests focus on the fabrication, modelling understanding of behaviour of quantum functional nanostructures, and their applications to nanoelectronics and nanophotonics.

TNFC would like to thank Prof. Ng for his strong commitment to the continued success of the Centre over the past 1.5 years, including his oversight for the successful implementation of a process database, as well as establishing TNFC’s membership in CMC’s FACT services program.

Please join us in thanking Prof. Ng for his work, and in welcoming Prof. Ruda as the new Director of the Toronto Nanofabrication Centre!