2018 Holiday Closure

TNFC Facilities (including Bahen, Pratt and Wallberg facilities) will be closed Friday, December 21, 2018 – Sunday January 6, 2019 inclusive.

TNFC technical staff will not be available for regular support or assistance during this time. Users may access the lab to store and retreive samples, however operation of equipment and processing (including work at the wetbenches) is prohibited.

TNFC staff wish all users a safe and happy 2018 holiday season!

2017 Holiday Closure

TNFC Facilities (including Bahen, Pratt and Wallberg facilities) will be closed Thursday, December 21, 2017 to Tuesday January 2, 2018 inclusive.

TNFC technical staff will not be available for regular support or assistance during this time. Users may access the lab to store and retreive samples, however operation of equipment and processing (including work at the wetbenches) is prohibited.

TNFC wishes all users a safe and happy 2017 holiday season!

TNFC 2016 Annual Newsletter

New Director for TNFC

TNFC is pleased to welcome back Professor Wai Tung Ng as the Director of the Centre as of July 1st, 2016. Professor Ng’s current research work covers a wide spectrum, ranging from smart power integrated circuits and fabrication processes, power management circuit, integrated SMPS (Switched-Mode Power Supplies), integrated class D audio power amplifiers, advanced MOS and RF BJT/HBT device designs.

Prof. Ng joined the University of Toronto in 1993 and established the Smart Power Integration & Semiconductor Devices Research Group. He has extensive experience in working with the industry to modify standard CMOS technology for smart PIC and RF applications. Prof. Ng has extensive collaboration experience with industrial sponsors including Fuji Electric, AMD, On Semi, Asahi Kasei EMD, Panasonic, etc. He is also an active researcher in automotive electronics in Canada’s Auto21 Network Center of Excellence program. Prof. Ng has been serving as an associate editor for IEEE Electron Device Letters since 2009.

TNFC would like to thank Prof. Ruda for his commitment to the continued success of the Centre over the past year. Please join us in thanking Prof. Ruda for his work, and in welcoming back Prof. Ng!

Upcoming User Engagement Meeting

** Pizza and refreshments will be served! **

TNFC will be holding a User Engagement Meeting on Wednesday, September 21st from 12:00-1:30pm (room TBD) to discuss TNFC’s capability, reliability, and accessibility updates, and to collect and address user feedback.

This will also be a great opportunity to discuss user feedback. We encourage all users to submit the User Feedback form available on our website (more details below) before the event.

Feedback Form Available

We encourage all users to use our (optionally anonymous) User Feedback online form to communicate suggestions or concerns regarding fab capability, reliability, and accessibility or otherwise regarding TNFC facilities.

The form can be submitted easily from our website (https://tnfc.utoronto.ca/home/user-resources/user-feedback/). Your feedback is essential for us to effectively plan future TNFC capability, develop better policies or design efficient process workflows for all users.

Reminder: Publication Acknowledgements

Just a reminder for users to acknowledge TNFC in publications. TNFC is also starting to compile a list of published research supported by TNFC services to display on our website. If you used TNFC facilities for research that is published, please send us the title of your publication!

Updates to User Policy & Fees

Reservation Penalty

Users that have reserved equipment must report any delays/cancellations to TNFC Staff no later than 30 minutes after the start time of their reservation on the Badger Reservation System. Users failing to give notice for equipment reservation delays/cancellations will be charged a penalty fee equal to their total reservation time.

Enabling Penalty

Users that are caught using TNFC equipment without properly enabling the equipment on the Badger Reservation System will be charged a penalty fee equal to at least 4 hours usage time on the equipment, or more, depending on the equipment used.

In addition, we have updated our User Fees reference page to include the current rates for equipment fees, staff fees, supply fees, and user training fees, as well as penalties and discounts available to researchers. (https://tnfc.utoronto.ca/home/user-access/rate-fees/).

2016 Nortel Undergraduate Scholarship

Established in 1997 with contributions from Nortel, the Government of Ontario, and the University of Toronto, the Nortel Institute Undergraduate Scholarship has an approximate value of $5000, and is awarded to an outstanding undergraduate student at the University of Toronto.

The recipient of the 2015-16 scholarship is Simran Dhunna, a student of Trinity College, Molecular Genetics.

Equipment Updates

Angstrom Nexdep E-Beam Evaporator

The new Angstrom Engineering NexDep Evaporator was installed and brought online at the end of 2015 in the Bahen Prototyping Facility.

Everbeing

EverbeingEverbeing International donated the EB-6 probe station. Dr. Pk TANG, president of Everbeing (picture below), visited TNFC on February 9th, 2016.

RIE Replacement

RIEThe new Oxford ICP-RIE machine has been delivered to the Pratt Microfabrication Facility! The new etcher has replaced the Trion Phantom Etcher, which was removed on July 20, 2016, after being used for more than a decade! The new ICP-RIE is expected to be operational for Fall 2016.

Visits

Zhejiang University Delegation

Zhejiang UniversityOn January 10, 2016, TNFC welcomed a delegation from the Zhejiang University, Hangzhou, China. The delegation included Vice President & Professor Jianhong Luo, as well as Vice Deans & Professors Zhi Chen and Xiaoming Li from the School of Medicine. A tour of the Bahen Prototyping Facility was given to the delegation.

Nanopolis Suzhou Visit

Nanopolis 1In February, Dr. Edward Xu visited Nanopolis Suzhou to start forming a partnership for sharing process capabilities.

 

Beyond Frontiers Netherlands

Beyond FrontiersBeyond Frontiers from the Netherlands was excited to experience a tour of Pratt Microfabrication Facility and Wallberg E-Beam Nanolithography Facility on May 6th!

TNFC on CHINano2015

A poster was available at the Canadian Pavillion of CHINano2015, Oct. 2015. In the past year, TNFC has become one of the key players in the Nano Innovation Center – Ontario Jiangsu.

 

TNFC 2015 Annual Newsletter

LPCVD Installation in Pratt Microfabrication Facility

The Expertech CTR-200 LPCVD Nitride Furnace is now online and available for user training and reservation. This furnace extends the processing range to 200mm diameter substrates.

The small footprint CTR system is stackable. The space above this unit is reserved for adding an identical LPCVD system for polysilicon deposition in the future.

Capabilities of the LPCVD tool include:
• High quality silicon nitride deposition
• 100mm – 200mm diameter wafers or 125mm – 156mm square substrates
• Batch loading up to 25 wafers/substrates
• Furnace Temperature Profiling up to ~900C with Triple-zone Control
• User specific programmable ramping recipes (up to 50 process steps)
• Intuitive Windows GUI with network access

CMP Installation in Pratt Microfabrication Facility

The Axus POLI 500 Chemical Mechanical Polisher (CMP) is now online and available for user training and reservation.

This tool can be used to achieve highly smooth, planarized surfaces on substrate materials for precise, topographically dependent processing, including MEMS applications.

Capabilities of the CMP tool include:
• Wafer Accommodation: Up to 6″
• Speed Range: 30-200 rpm
• Head Oscillation: ±12mm
• Pressing Method: Variable Air Pressure Electronic Controller, 1 psi ~ 10 psi for 4″ Wafer
• Intuitive touch screen interface
• Stable Repeatability (WTWNU < 5%)

New Thermal Evaporator Purchased

TNFC has received funding from Prof. Ted Sargent’s CFI award for ” Nanomaterials for Energy “. We have ordered a new Thermal Evaporator Multi-Source Deposition System to replace the aging (over 12 years old) and failure-prone thermal evaporator in the Pratt Cleanroom and electron-beam evaporator in the Bahen Cleanroom. This new system will feature :

• Four pocket electron-beam source with two axis beam sweep control
• Two positions for thermal filament or boat sources
• Rotating and heated (up to 400 C) substrate holder
• Capable of sequential and co-deposition of films
• Modern computer control with automated sequencing and process data logging

This highly anticipated new Thermal Evaporator will start-up in the Fall of 2015.

TNFC Joins CMC FACT Services

In 2014, TNFC became an inaugural member in a CMC project to implement a nationwide process development database and workflow design tool. The new FACT Services program allows external CMC clients to select and combine process capabilities from a number of open-access microfabrication facilities throughout Canada, including TNFC.

2015 Nortel Undergraduate Scholarship

Established in 1997 with contributions from Nortel, the Government of Ontario, and the University of Toronto, the Nortel Institute Undergraduate Scholarship has an approximate value of $5000, and is awarded to an outstanding undergraduate student at the University of Toronto.

The recipient of the 2014-15 scholarship is Trillium Chang, a student of Trinity College, Pathobiology & Genetics.

New Director for TNFC Starting July 1st

TNFC is pleased to welcome Professor Harry Ruda (MSE) as the next Director of the Centre, taking over for Professor Wai Tung Ng (2014- 2015 Director) as of July 1st, 2015.
Harry E. Ruda received the B.Sc. degree (with distinction) from Imperial College of Science and Technology, UK in 1983, and Ph.D. degree from Massachusetts Institute of Technology, Cambridge, USA in 1982. In 1989, he joined the MSE department at the University of Toronto, cross appointed to ECE. In 1997 he was appointed as the Director of University of Toronto’s Centre for Nanotechnology.

Professor Ruda has published over 250 publications in internationally refereed journals (with >2,800 SCI citations), co-authored 4 books and has 14 patents. His research interests focus on the fabrication, modelling understanding of behaviour of quantum functional nanostructures, and their applications to nanoelectronics and nanophotonics.

TNFC would like to thank Prof. Ng for his strong commitment to the continued success of the Centre over the past 1.5 years, including his oversight for the successful implementation of a process database, as well as establishing TNFC’s membership in CMC’s FACT services program.

Please join us in thanking Prof. Ng for his work, and in welcoming Prof. Ruda as the new Director of the Toronto Nanofabrication Centre!